易泛特技术（深圳）有限公司

• Home
• Products

Effecttek 3D测量系统采用白光和红光等纳米级分辩率的光学器件，配合高精度X/Y/Z移动平台和强大的3D软件算法处理，帮助用户解决精密测量难题，包括：线宽膜厚测量、高度差测量、平面度测量、共面度测量、粗糙度测量等，对透明材质的多层测量也得心应手；

产品广泛应用于微电子、半导体、5G、3D玻璃、新型医疗、精密工业制造等领域，提供从产品研发、设计到加工验收的高精度测量支持。

Film thickness measuring instrument E-80
1. Non-contact optical measurement system 2. Corresponding to various materials, linearity ±0.5μm 3. High-speed sampling, the fastest cycle is 20μs 4. Powerful CPK statistics function 5. Measure contour, fault, groove depth, height, etc.... More Info Less Info


1. Adopting white light confocal technology, the resolution reaches the nanometer level, and the optical fiber sensor is adopted, which has the advantages of anti-interference, low loss, safe isolation, and high reliability.
2. The mechanical precision reaches the micron level, the operation is stable, the runout is small, and the wear is low
3. Y-direction automatic measurement, repeat accuracy 1μm

Film thickness measuring instrument EA-160
1. The maximum range of 160mm×160mm is automatically measured 2. Repeated measurement accuracy ≤0.5μm 3. Suitable for high reflective and high light transmission materials 4. Measure film thickness, line width, flatness, etc.... More Info Less Info


1. Using white light confocal technology, the resolution reaches 5nm and the maximum range is 13mm
2. The motion accuracy of 0-160mm reaches the micron level, there is no mechanical contact in the X and Y directions, and the fully closed loop feedback system is adopted to achieve high-precision measurement
3. High-precision, high-resolution CCD system, combined with effecttetk software algorithm, supports image positioning auxiliary system

Film thickness measuring instrument ES-200
1. Non-contact 3D surface scanning system 2. Equipped with X, Y, Z high-precision motion platform 3. Automatic measurement within 200mm×200mm 4. 2D profile view and 3D point cloud 5. Friendly man-machine interface 6. Measure surface roughness... More Info Less Info


1. Using white light interference technology, the resolution reaches nanometer level, and the maximum field of view is 100mm
2. 0-200mm motion accuracy reaches micron level, stable operation, small runout and low wear

Semicondutor /LED/LCD; Second hand equipment
Main porducts includs: Optics, Lamp, Chuck Clean Wafer, E-chuck, Focks Ring, PR & Chemicals, Laser head, Ceramics, Quartz, Clean Bottle, Filter,Valve, X-Ray; Used Machine Refurb & Tech Support ESC New & Over haul ... More Info Less Info



·Hg Lamp
·UV Lamp
·Xenon Lamp
·Halogen Lamp
·Heater Lamp
·Sunlight Lamp
·Flash Lamp
·LED lamp
·Others